| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Harry L. Stover |
| Title | Optical Microlithography II: Technology for the 1980s: March 16-17, 1983, Santa Clara, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1983 |
| Languages | eng |
| Isbn | 0892524294 |
| Series | SPIE Proceedings |
| Volume | 394 |
| Description | vi, 251 p. ill. 28 cm. |
| Record date | 20090717 |
| Location | Bellingham, Wash., USA |
| Keywords | Microlithography, Integrated circuits |