| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Kevin M. Monahan |
| Title | Integrated Circuit Metrology, Inspection, and Process Control II: 29 February-1 March 1988, Santa Clara, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1988 |
| Languages | eng |
| Isbn | 0892529563 |
| Series | SPIE Proceedings |
| Volume | 921 |
| Description | viii, 458 p. ill. 28 cm. |
| Record date | 20130902 |
| Location | Bellingham, Wash. |