| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Susan K. Jones |
| Title | Metrology, Inspection, and Process Control for Microlithography XI: 10-12 March 1997, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1997 |
| Languages | eng |
| Isbn | 0819424641 |
| Series | SPIE Proceedings |
| Volume | 3050 |
| Issn | 99-0108644 |
| Description | 636 s. |
| Record date | 20100817 |
| Location | Bellingham, Wash., USA |