| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Richard M. Silver |
| Title | Metrology, Inspection, and Process Control for Microlithography XVIII: Part 1/2: 23-26 February 2004, Santa Clara, California, USA |
| Publisher | Spie |
| Year | 2004 |
| Languages | eng |
| Isbn | 0819452882 |
| Series | SPIE Proceedings |
| Volume | 5375:1/2 |
| Description | 2 v. (xl, 1398 p.) ill. 28 cm. |
| Record date | 20090821 |
| Location | Bellingham, Wash. |
| Keywords | Integrated circuits, Microlithography, Process control |