| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Alexander M. Prokhorov, V. S. Ramamurthy |
| Title | Indo-Russian Workshop on Micromechanical Systems: 2-4 Februrary 1999, New Delhi, India |
| Publisher | SPIE Optical Engineering Press |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819435139 |
| Series | SPIE Proceedings |
| Volume | 3903 |
| Description | 326 s. |
| Record date | 20090806 |
| Location | Bellingham, Wash., USA |