Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | David E. Seeger |
Title | Emerging Lithographic Technologies: 10-11 March 1997, Santa Clara, California |
Publisher | SPIE Optical Engineering Press |
Year | 1997 |
Languages | eng |
Isbn | 0819424625 |
Series | SPIE Proceedings |
Volume | 3048 |
Issn | 99-0108644 |
Description | 412 s. |
Record date | 20100817 |
Location | Bellingham, Wash., USA |