| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Anthony E. Novembre |
| Title | Advances in Resist Technology and Processing IX: 9-10 March 1992, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 0819408271 |
| Series | SPIE Proceedings |
| Volume | 1672 |
| Issn | 99-0108644 |
| Description | 684 s. |
| Record date | 20100810 |
| Location | Bellingham, Wash., USA |
| Keywords | Microlithography, Tryckta kretsar, Printed circuits, Konferenspublikationer, Conference proceedings |