| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Rajendra Singh, Mehrdad M. Moslehi |
| Title | Rapid Thermal and Related Processing Techniques: 2-3 October 1990, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1991 |
| Languages | eng |
| Isbn | 0819404624 |
| Series | SPIE Proceedings |
| Volume | 1393 |
| Issn | 99-0108644 |
| Description | 422 s. |
| Record date | 20100810 |
| Location | Bellingham, Wash., USA |
| Keywords | Chemical vapour deposition, Tillverkning av integrerade kretsar, Manufacture of integrated circuits, Konferenspublikationer, Conference proceedings |