Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Editor: Charles C. Tang |
Title | Laser Processing of Semiconductor Devices: January 18-19, 1983, Los Angeles, California |
Publisher | SPIE - The International Society for Optical Engineering |
Year | 1983 |
Languages | eng |
Isbn | 0892524200 |
Series | SPIE Proceedings |
Volume | 385 |
Description | vi, 155 p. 28 cm. |
Record date | 20130826 |
Location | Bellingham, Wash. |