| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Michael R. Descour, Juha T. Rantala |
| Title | Functional Integration of Opto-Electro-Mechanical Devices and Systems: 24-25 January 2001, San Jose, USA |
| Publisher | Spie |
| Year | 2001 |
| Languages | eng |
| Isbn | 0819439622 |
| Series | SPIE Proceedings |
| Volume | 4284 |
| Description | xxx, 152 p. ill. 28 cm. |
| Record date | 20090820 |
| Location | Bellingham, Wash. |
| Keywords | Optoelectronic devices, Microelectromechanical systems, Microelectronic packaging |