| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: James C. Wyant |
| Title | Precision Surface Metrology: August 23-24, 1983, San Diego, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1983 |
| Languages | eng |
| Isbn | 0892524642 |
| Series | SPIE Proceedings |
| Volume | 429 |
| Description | vi, 207 p. 28 cm. |
| Record date | 20130826 |
| Location | Bellingham, Wash. |