| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Deepak Ranadive |
| Title | Dry Etch Technology: 9-10 September 1991, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 0819407240 |
| Series | SPIE Proceedings |
| Volume | 1593 |
| Description | viii, 222 s. |
| Record date | 20090721 |
| Location | Bellingham, Wash., USA |