| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam |
| Title | Micromachining and Microfabrication Process Technology VIII: 27-29 January 2003, San Jose, California, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2003 |
| Languages | eng |
| Isbn | 081944779X |
| Series | SPIE Proceedings |
| Volume | 4979 |
| Issn | 99-0108644 |
| Description | 604 s. |
| Record date | 20100823 |
| Location | Bellingham, Wash., USA |