| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | D. E. Aspnes, S. So, R. F. Potter |
| Title | Optical Characterization Techniques for Semiconductor Technology: April 1-2, 1981, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1981 |
| Languages | eng |
| Isbn | 0892523093 |
| Series | SPIE Proceedings |
| Volume | 276 |
| Issn | 99-0108644 |
| Description | 262 s. diagr., ill., tab. |
| Record date | 20100805 |
| Location | Bellingham, Wash. |