| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Gennady S. Gildenblat, Gary P. Schwartz |
| Title | Metallization: Performance and Reliability Issues for VLSI and ULSI: 12-13 September 1991, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1991 |
| Languages | eng |
| Isbn | 0819407275 |
| Series | SPIE Proceedings |
| Volume | 1596 |
| Issn | 99-0108644 |
| Description | 158 s. |
| Record date | 20100810 |
| Location | Bellingham, Wash., USA |
| Keywords | VLSI, ULSI, Electromigration, Integrerade kretsar, Integrated circuits, Mycket storskalig integration, Very large scale integration, Konferenspublikationer, Conference proceedings |