| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Susan D. Allen |
| Title | Laser Assisted Deposition, Etching, and Doping: January 26-27, 1984, Los Angeles, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1984 |
| Languages | eng |
| Isbn | 0892524944 |
| Series | SPIE Proceedings |
| Volume | 459 |
| Description | vi, 139 p. 28 cm. |
| Record date | 20130826 |
| Location | Bellingham, Wash. |