| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Colin G. Gordon |
| Title | Vibration Control in Microelectronics, Optics, and Metrology: 4-6 November 1991, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 0819407577 |
| Series | SPIE Proceedings |
| Volume | 1619 |
| Issn | 99-0108644 |
| Description | 369 s. |
| Record date | 20100810 |
| Location | Bellingham, Wash., USA |
| Keywords | Microelectronics, Optics, Metrology, Vibrationsmätning, Vibration measurement, Konferenspublikationer, Conference proceedings |