Shelfclass_id |
S/SPIE |
Sortkey |
S/SPIE |
Authors |
Colin G. Gordon |
Title |
Vibration Control in Microelectronics, Optics, and Metrology: 4-6 November 1991, San Jose, California |
Publisher |
SPIE Optical Engineering Press |
Year |
1992 |
Languages |
eng |
Isbn |
0819407577 |
Series |
SPIE Proceedings |
Volume |
1619 |
Issn |
99-0108644 |
Description |
369 s. |
Record date |
20100810 |
Location |
Bellingham, Wash., USA |
Keywords |
Microelectronics, Optics, Metrology, Vibrationsmätning, Vibration measurement, Konferenspublikationer, Conference proceedings |