| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Guofan Jin, John S. McKillop, Kazuhiro Hane |
| Title | MEMS/MOEMS Technologies and Applications: 17-18 October 2002, Shanghai, China |
| Publisher | Spie |
| Year | 2002 |
| Languages | eng |
| Isbn | 081944717X |
| Series | SPIE Proceedings |
| Volume | 4928 |
| Issn | 1047-9899 |
| Description | ix, 302 p. ill. 28 cm. |
| Record date | 20100823 |
| Location | Bellingham, Washington |
| Nlmed | TK7875 |
| Keywords | Microelectromechanical systems, Optoelectronic devices |