Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Bernard Courtois, Selden B. Crary, Kaigham J. Gabriel, Jean Michel Karam, Karen Markus, Andrew A. O. Tay |
Title | Design, Test, Integration, and Packaging of MEMS/MOEMS: 9-11 May 2000, Paris, France |
Publisher | SPIE Optical Engineering Press |
Year | 2000 |
Languages | eng |
Isbn | 0819436453 |
Series | SPIE Proceedings |
Volume | 4019 |
Description | 596 s. |
Record date | 20090811 |
Location | Bellingham, Wash., USA |