| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Bernard Courtois, Selden B. Crary, Kaigham J. Gabriel, Jean Michel Karam, Karen Markus, Andrew A. O. Tay |
| Title | Design, Test, Integration, and Packaging of MEMS/MOEMS: 9-11 May 2000, Paris, France |
| Publisher | SPIE Optical Engineering Press |
| Year | 2000 |
| Languages | eng |
| Isbn | 0819436453 |
| Series | SPIE Proceedings |
| Volume | 4019 |
| Description | 596 s. |
| Record date | 20090811 |
| Location | Bellingham, Wash., USA |