| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Uwe F. W. Behringer |
| Title | 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 12-14 January 2004, Dresden, Germany |
| Publisher | Spie |
| Year | 2004 |
| Languages | eng |
| Isbn | 0819454370 |
| Series | SPIE Proceedings |
| Volume | 5504 |
| Description | xxiv, 210 p. ill. 28 cm. |
| Record date | 20090821 |
| Location | Bellingham, Wash., USA |
| Keywords | Integrated circuits, Microlithography |