| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Esther Krikorian |
| Title | Semiconductor Growth Technology: January 26-27, 1982, Los Angeles, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1982 |
| Languages | eng |
| Isbn | 0892523581 |
| Series | SPIE Proceedings |
| Volume | 323 |
| Description | vi, 176 p. 28 cm. |
| Record date | 20130826 |
| Location | Bellingham, Wash. |