| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Anant G. Sabnis, Ivo J. Raaijmakers |
| Title | Process, Equipment, and Materials Control in Integrated Circuit Manufacturing: 25-26 October 1995, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1995 |
| Languages | eng |
| Isbn | 0819420034 |
| Series | SPIE Proceedings |
| Volume | 2637 |
| Issn | 99-0108644 |
| Description | 238 s. |
| Record date | 20100816 |
| Location | Bellingham, Wash., USA |
| Keywords | Integrated circuit manufacturing, Mikrolitografi, Microlithography, Konferenspublikationer, Conference proceedings |