| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Eric Munro, Henry P. Freund |
| Title | Electron-Beam Sources and Charged-Particle Optics: 10-14 July 1995, San Diego, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1995 |
| Languages | eng |
| Isbn | 0819418811 |
| Series | SPIE Proceedings |
| Volume | 2252 |
| Description | x, 536 s. |
| Record date | 20090728 |
| Location | Bellingham, Wash., USA |
| Keywords | Electron-beam lithography, Lenses, Ion beams, Elektronoptik, Electron optics, Elektronstrålar, Electron beams, Laddade partikelstrålar, Charged particle beams, Konferenspublikationer, Conference proceedings |