Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Eric Munro, Henry P. Freund |
Title | Electron-Beam Sources and Charged-Particle Optics: 10-14 July 1995, San Diego, California |
Publisher | SPIE Optical Engineering Press |
Year | 1995 |
Languages | eng |
Isbn | 0819418811 |
Series | SPIE Proceedings |
Volume | 2252 |
Description | x, 536 s. |
Record date | 20090728 |
Location | Bellingham, Wash., USA |
Keywords | Electron-beam lithography, Lenses, Ion beams, Elektronoptik, Electron optics, Elektronstrålar, Electron beams, Laddade partikelstrålar, Charged particle beams, Konferenspublikationer, Conference proceedings |