| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | T. Letardi |
| Title | Excimer Lasers and Applications II: ECO3: 15 March 1990, The Hague, The Netherlands |
| Publisher | SPIE Optical Engineering Press |
| Year | 1990 |
| Languages | eng |
| Isbn | 0819403253 |
| Series | SPIE Proceedings |
| Volume | 1278 |
| Description | 147 s. |
| Record date | 20090720 |
| Location | Bellingham, Wash., USA |
| Keywords | Excimer lasers, Laserbearbetning, Konferenspublikationer, Conference proceedings |