| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Burn J. Lin |
| Title | Optical/Laser Microlithography II: 1-3 March 1989, San Jose, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1989 |
| Languages | eng |
| Isbn | 0819401234 |
| Series | SPIE Proceedings |
| Volume | 1088 |
| Description | viii, 572 p. ill. 28 cm. |
| Record date | 20130907 |
| Location | Bellingham, Wash. |