| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: William H. Arnold |
| Title | Integrated Circuit Metrology, Inspection, and Process Control V: 4-5 March 1991, San Jose, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1991 |
| Languages | eng |
| Isbn | 0819405639 |
| Series | SPIE Proceedings |
| Volume | 1464 |
| Description | x, 630 p. ill. 28 cm. |
| Record date | 20130908 |
| Location | Bellingham, Wash. |