| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editors: James W. Giffin, Bruce Ruff |
| Title | Developments in Semiconductor Microlithography II: April 4-5, 1977, San Jose, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1977 |
| Languages | eng |
| Isbn | 0892521279 |
| Series | SPIE Proceedings |
| Volume | 100 |
| Description | viii, 176 p. 28 cm. |
| Record date | 20130823 |
| Location | Bellingham, Wash. |