| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Jagdish P. Mathur, John Lowell, Ray T. Chen |
| Title | Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing: 20 October 1994, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1994 |
| Languages | eng |
| Isbn | 0819416703 |
| Series | SPIE Proceedings |
| Volume | 2337 |
| Issn | 99-0108644 |
| Description | 202 s. |
| Record date | 20100813 |
| Location | Bellingham, Wash., USA |
| Keywords | Holographic lithography, Tillverkning (Mycket storskalig integration) (Elektronik), Manufacturing (Very large scale integration) (Electronic engineering), Konferenspublikationer, Conference proceedings |