| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Alexander Starikov, Kenneth W. Tobin Jr. |
| Title | Design, Process Integration, and Characterization for Microelectronics: 6-7 March 2002, Santa Clara, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2002 |
| Languages | eng |
| Isbn | 0819444391 |
| Series | SPIE Proceedings |
| Volume | 4692 |
| Issn | 99-0108644 |
| Description | 628 s. |
| Record date | 20100823 |
| Location | Bellingham, Wash., USA |