| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | William D. Hinsberg |
| Title | Advances in Resist Technology and Processing X: 1-2 March 1993, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1993 |
| Languages | eng |
| Isbn | 0819408271 |
| Series | SPIE Proceedings |
| Volume | 1925 |
| Issn | 99-0108644 |
| Description | 738 s. |
| Record date | 20100813 |
| Location | Bellingham, Wash., USA |
| Keywords | Resist technology, Microlithography, Chemically amplified resists, Dissolution inhibition, Dry-developed resists, Tryckta kretsar, Printed circuits, Konferenspublikationer, Conference proceedings |