| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | John D. Cuthbert |
| Title | Optical/Laser Microlithography V: Part 2/2: 11-13 March 1992, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 0819408298 |
| Series | SPIE Proceedings |
| Volume | 1674:2/2 |
| Description | 2 vol. |
| Record date | 20090722 |
| Location | Bellingham, Wash., USA |
| Keywords | Phase-shift methods, DUV lithography, Mikrolitografi, Microlithography, Konferenspublikationer, Conference proceedings |