| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Yuli Vladimirsky |
| Title | Emerging Lithographic Technologies II: 23-25 February 1998, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1998 |
| Languages | eng |
| Isbn | 0819427764 |
| Series | SPIE Proceedings |
| Volume | 3331 |
| Issn | 99-0108644 |
| Description | 702 s. |
| Record date | 20100818 |
| Location | Bellingham, Wash., USA |