| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Wolfgang Karthe |
| Title | Nanofabrication Technologies and Device Integration: 13-14 April 1994, Lindau FRG |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1994 |
| Languages | eng |
| Isbn | 0819415170 |
| Series | SPIE Proceedings |
| Volume | 2213 |
| Description | ix, 334 p. ill. 28 cm. |
| Record date | 20130908 |
| Location | Bellingham, Wash. |
| Notes | Proceedings EurOpto Series |