Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Bernard Courtois, Serge Demidenko |
Title | Design, Characterization, and Packaging for MEMS and Microelectronics: 27-29 October 1999, Royal Pines Resort, Queensland, Australia |
Publisher | SPIE Optical Engineering Press |
Year | 1999 |
Languages | eng |
Isbn | 0819434949 |
Series | SPIE Proceedings |
Volume | 3893 |
Description | 512 s. |
Record date | 20090806 |
Location | Bellingham, Wash., USA |