| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Harry L. Stover |
| Title | Optical Microlithography VI: 4-5 March 1987, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1987 |
| Languages | eng |
| Isbn | 0892528079 |
| Series | SPIE Proceedings |
| Volume | 772 |
| Issn | 99-0108644 |
| Description | vi, 292 s. ill. |
| Record date | 20100806 |
| Location | Bellingham, Wash., USA |
| Keywords | Tryckta kretsar, Printed circuits, Konferenspublikationer, Conference proceedings |