| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Daniel J. Ehrlich |
| Title | Lasers in Microlithography: 2-3 March 1987, Santa Clara, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1987 |
| Languages | eng |
| Isbn | 0892528095 |
| Series | SPIE Proceedings |
| Volume | 774 |
| Description | iv, 192 p. ill. 28 cm. |
| Record date | 20130901 |
| Location | Bellingham, Wash. |