Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Editor: Diana Nyyssonen |
Title | Integrated Circuit Metrology: May 4-5, 1982, Arlington, Virginia |
Publisher | SPIE - The International Society for Optical Engineering |
Year | 1982 |
Languages | eng |
Isbn | 0892523778 |
Series | SPIE Proceedings |
Volume | 342 |
Description | vi, 132 p. 28 cm. |
Record date | 20130826 |
Location | Bellingham, Wash. |