| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Harold G. Craighead, J. Murray Gibson |
| Title | Nanostructures and Microstructure Correlation with Physical Properties of Semiconductors: 20-21 March 1990, San Diego, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1990 |
| Languages | eng |
| Isbn | 0819403350 |
| Series | SPIE Proceedings |
| Volume | 1284 |
| Description | x, 268 s. |
| Record date | 20090720 |
| Location | Bellingham, Wash., USA |
| Keywords | Microfabrication, Halvledare, Semiconductors, Konferenspublikationer, Conference proceedings |