| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Vijay K. Varadan, Paul J. McWhorter, Richard A. Singer, Michael J. Vellekoop |
| Title | Smart Structures and Materials 1998: Smart Electronics and MEMS: 2-4 March 1998, San Diego, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1998 |
| Languages | eng |
| Isbn | 0819427721 |
| Series | SPIE Proceedings |
| Volume | 3328 |
| Description | 430 s. |
| Record date | 20090801 |
| Location | Bellingham, Wash., USA |