| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Bernard Courtois, Jean Michel Karam, Steven P. Levitan, Karen W. Markus, Andrew A. O. Tay, James A. Walker |
| Title | Design, Test, Integration, and Packaging of MEMS/MOEMS 2001: 25-27 April 2001, Cannes, France |
| Publisher | Spie |
| Year | 2001 |
| Languages | eng |
| Isbn | 0819441090 |
| Series | SPIE Proceedings |
| Volume | 4408 |
| Description | xvi, 558 p. ill. 28 cm. |
| Record date | 20090820 |
| Location | Bellingham, Washington |
| Keywords | Microelectromechanical systems, Optoelectronic devices, Micromachining, Microelectronic packaging |