| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editors: Harry L. Stover, Steven Wittekoek |
| Title | Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection: 2-3 April 1987, The Hague, The Netherlands |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1987 |
| Languages | eng |
| Isbn | 089252846X |
| Series | SPIE Proceedings |
| Volume | 811 |
| Description | x, 211 p. ill. 28 cm. |
| Record date | 20130901 |
| Location | Bellingham, Wash. |