Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Ih-Chin Chen, Nobuo Sasaki, Divyesh N. Patel, Girish A. Dixit |
Title | Microelectronic Device and Multilevel Interconnection Technology II: 16-17 October 1996, Austin, Texas |
Publisher | SPIE Optical Engineering Press |
Year | 1996 |
Languages | eng |
Isbn | 0819422738 |
Series | SPIE Proceedings |
Volume | 2875 |
Description | 392 s. |
Record date | 20090828 |
Location | Bellingham, Wash., USA |
Keywords | Microelectronics, Interconnection technology, Memory, Teknisk optik, Applied optics |