| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Ih-Chin Chen, Nobuo Sasaki, Divyesh N. Patel, Girish A. Dixit |
| Title | Microelectronic Device and Multilevel Interconnection Technology II: 16-17 October 1996, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1996 |
| Languages | eng |
| Isbn | 0819422738 |
| Series | SPIE Proceedings |
| Volume | 2875 |
| Description | 392 s. |
| Record date | 20090828 |
| Location | Bellingham, Wash., USA |
| Keywords | Microelectronics, Interconnection technology, Memory, Teknisk optik, Applied optics |