| Shelfclass_id | 7.F |
| Sortkey | STEINBRÜCHEL, CHRISTOPH |
| Authors | Christoph Steinbrüchel, Barry L. Chin |
| Title | Copper Interconnect Technology |
| Publisher | SPIE Optical Engineering Press |
| Year | 2001 |
| Languages | eng |
| Isbn | 0819438979 |
| Series | Tutorial texts in optical engineering |
| Volume | 46 |
| Description | viii, 122 p. ill. 26 cm. |
| Record date | 20070423 |
| Location | Bellingham, WA |
| Keywords | Electronic packaging, Semiconductors, Microelectronic packaging, Copper |
| Notes | Steinbruchel, Christoph |