| Shelfclass_id | 7.F |
| Sortkey | GRABOWSKI, KENNETH S |
| Authors | Kenneth S. Grabowski, Scott A. Barnett, Stephen M. Rossnagel, Kiyotaka Wasa |
| Title | Materials Modification by Energetic Atoms and Ions: Symposium held April 28-30, 1992, San Francisco, California, USA |
| Publisher | Materials Research Society |
| Year | c1992 |
| Languages | eng |
| Isbn | 1558991638 |
| Series | Materials Research Society symposium proceedings |
| Volume | 268 |
| Description | xiii, 405 p. ill. 24 cm. |
| Record date | 20070223 |
| Location | Pittsburgh, PA |
| Keywords | Semiconductors, Plasma etching, Ion bombardment, Thin films |