| Shelfclass_id | 7.C |
| Sortkey | S/ SPIE MS 55 |
| Authors | Harry L. Stover |
| Title | Selected papers on optical microlithography |
| Publisher | SPIE Optical Engineering Press |
| Year | c1992 |
| Languages | eng |
| Isbn | 0819409855, 0819409863 |
| Series | SPIE Milestone Series |
| Volume | 55 |
| Description | (hard) (soft) xviii, 676 p. ill. 28 cm |
| Record date | 20060817 |
| Location | Bellingham, Wash. |
| Keywords | Semiconductors, Microlithography, Masks (Electronics) |
| Notes | Papers originally published in various journals, 1974-1991 |