| Shelfclass_id | 7.C |
| Sortkey | S/ SPIE MS 27 |
| Authors | R. M. A. Azzam |
| Title | Selected papers on ellipsometry |
| Publisher | SPIE Optical Engineering Press |
| Year | c1990 |
| Languages | eng |
| Isbn | 081940571X |
| Series | SPIE Milestone Series |
| Volume | 27 |
| Description | xxi, 707 p. ill. 28 cm. |
| Record date | 20070326 |
| Location | Bellingham, WA |
| Keywords | Ellipsometry |