| Shelfclass_id | 7.C |
| Sortkey | JAIN, KANTI |
| Authors | Kanti Jain |
| Title | Excimer Laser Lithography |
| Publisher | SPIE Optical Engineering Press |
| Year | c1990 |
| Languages | eng |
| Isbn | 0819402710, 0819402729 |
| Description | $35.00(est.) (hard) $50.00 (est.) x, 212 p. ill. 26 cm. |
| Record date | 20070223 |
| Location | Bellingham, Wash., USA |
| Keywords | Excimer lasers, Microlithography |