| Shelfclass_id | 7.B |
| Sortkey | LIEBERMAN, M. A |
| Authors | M. A. Lieberman, Allan J. Lichtenberg |
| Title | Principles of Plasma Discharges and Materials Processing |
| Publisher | Wiley |
| Year | c1994 |
| Languages | eng |
| Isbn | 0471005770 |
| Description | xxvi, 572 p. ill. 25 cm |
| Record date | 20060816 |
| Location | New York |
| Keywords | Plasma dynamics, Thin films, Plasma etching, Plasma chemistry |
| Notes | "A Wiley-Interscience publication." |
| Urlnote | Table of Contents |
| Urls | http://www.loc.gov/catdir/toc/onix03/94028954.html |