| Shelfclass_id | 6.G |
| Sortkey | MICRO ELECTRO |
| Authors | IEEE, American Society of Mechanical Engineers |
| Title | Micro Electro 1993: Proceedings, IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines, and Systems: Fort Lauderdale, Florida, February 7-10, 1993 |
| Publisher | Institute of Electrical and Electronics Engineers |
| Year | 1993 |
| Languages | eng |
| Isbn | 078030957X, 0780309588 |
| Description | xvii, 295 p. ill. 28 cm |
| Record date | 20120221 |
| Location | New York |
| Keywords | Electromechanical devices, Congresses, Microelectronics, Detectors, Actuators |