| Shelfclass_id | 6.G |
| Sortkey | MICRO ELECTRO |
| Authors | IEEE, American Society of Mechanical Engineers, IEE of Japan |
| Title | Micro Electro 1991: Proceedings, IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots: Nara, Japan, 30 January-2 February, 1991 |
| Publisher | Institute of Electrical and Electronics Engineers |
| Year | 1991 |
| Languages | eng |
| Isbn | 0879426411 |
| Description | xiv, 288 p. ill. 30 cm |
| Record date | 20120221 |
| Location | New York |
| Keywords | Electromechanical devices, Congresses, Microelectronics, Detectors, Actuators |